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Anglický jazyk
Micro and Nano Fabrication
Autor: Hans H. Gatzen
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process... Viac o knihe
Na objednávku
82.27 €
bežná cena: 93.49 €
O knihe
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- Vydavateľstvo: Springer Berlin Heidelberg
- Rok vydania: 2016
- Formát: Paperback
- Rozmer: 235 x 155 mm
- Jazyk: Anglický jazyk
- ISBN: 9783662508268
Nemecký jazyk 