• Anglický jazyk

Handbook of Photomask Manufacturing Technology

Autor: Syed Rizvi

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to... Viac o knihe

Na objednávku

368.98 €

bežná cena: 388.40 €

O knihe

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. This valuable reference provides a comprehensive summary of all areas of mask technology in a single work, featuring contributions from 40 internationally reputable authors from industry, academia, government, national labs, and consortia. They discuss conventional masks and their supporting technologies, as well as next-generation technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography.

  • Vydavateľstvo: CRC Press
  • Rok vydania: 2005
  • Formát: Hardback
  • Rozmer: 260 x 183 mm
  • Jazyk: Anglický jazyk
  • ISBN: 9780824753740

Generuje redakčný systém BUXUS CMS spoločnosti ui42.