• Anglický jazyk

Micro and Nano Fabrication

Autor: Hans H. Gatzen

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process... Viac o knihe

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116.15 €

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O knihe

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

  • Vydavateľstvo: Springer Berlin Heidelberg
  • Rok vydania: 2015
  • Formát: Hardback
  • Rozmer: 241 x 160 mm
  • Jazyk: Anglický jazyk
  • ISBN: 9783662443941

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